氣體質量流量控制器
集研發、生產、銷售于一體
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點擊次數：1802 更新時間：2019-12-30
快速的響應時間
金屬密封.
壓電控制閥.
316L不銹鋼材質.
5 ccm-100 slm流量
技術規格:
Model | SEC-4400 | SEC-4500 | SEC-4550 | SEC-4600 |
Standard Flow Range(N2 Eq.) | 5 sccm ~ 8 slm | 10 ~ 30 slm | 31 ~ 50 slm | 51 ~ 100 slm |
Wetted Materials | M (metal) -Type: SUS-316L-R (viton) type | |||
Valve Piezo Valve | (Normal Close or Normal Open) | |||
Flow Control Range | 2 ~ 100% F.S. | |||
Accuracy | ± 1% F.S. | |||
Response | <1.0sec. (500ms typical) | |||
Linearity | ± 0.5% F.S. | |||
Repeatability | ± 0.2% F.S. | |||
Operating Pressure | 14 ~ 42 psi | 21 ~ 42 psi | ||
Leak Integrity | M-Type: 5x10 -10 Pa·m 3/s(He) or less | |||
Operating Temperature | 5 ~ 50 °C (Accuracy guaranteed 15 ~ 35 °C) | |||
Flow Rate Setting Signal | 0.1 ~ 5VDC | |||
Flow Rate Output Signal | 0 ~ 5VDC | |||
Power Supply | ± 15VDC ± 5% 60mA | |||
Standard Fitting | 1/4” VCR, 1/4” Swagelok | 3/8”VCR,3/8”Swagelok | ||
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